Adamant-Namiki employs a unique crystal growth method, EFG (Edge-defined Film-Fed Growth Method), that eliminates the need for additional processing by growing single crystal sapphire in a sheet-shape, thereby enabling the sapphire wafer to meet QCD (quality, cost, and delivery) requirements.
In addition to standard grade substrates for general LED use, we also offer high quality, prime grade wafers. The high quality cleaning applied to prime grade wafers results in low particles and low metal contamination(*) . (*) K,Ca,Ti,Cr,Mn,Fe,Co,Ni,Cu,Zn < 5E10 /cm2 with TXRF We control flatness (TTV,BOW,WARP, etc.) with precision manufacturing technology, and warpage problem that can occur during epitaxial growth is minimized. The prime grade wafer is optimal for new process/product development. Application examples of prime grade wafer: micro-LED, DUV-LED, RF device, AlN/Ga2O3 template.
|Diameter||φ2 inch||φ4 inch||φ6 inch||φ8 inch|
|Material||Artificial sapphire（ Al2O3 ≥ 99.99%）|
|OF orientation||a-plane 0±0.3°|
|BOW *||-10 ~ 0μm||-15 ~ 0μm||-20 ~ 0μm||-25 ~ 0μm|
|Front side |
|Back side |
|Lapping (Ra 0.6 - 1.2μm)|
|Packaging||Vacuum packaging in clean room|
|Prime grade||High quality cleaning ： particle size ≧ 0.3um), ≦ 0.18pcs/cm2, metal contamination ≦ 5E10/cm2|
|Remarks||Customizable specifications: a/ r/ m-plane orientation, off-angle, shape, double side polishing|
*TTV (Total Thickness Variation):TTV is the difference between the maximum and minimum values of the wafer thickness
*BOW:The distance between the surface and the best fit plane at the center of an unclamped wafer
*Warp:The difference between the maximum positive and minimum deviations from the best fit plane (wafer unclamped)
High quality and services for next-generation semiconductor devices and epitaxial growth
- High flatness (controlled TTV, BOW, and WARP etc.)
- High quality cleaning (low particles, lowmetal contamination)
- Substrate drilling, grooving, cutting, and backside polishing
- Attachment of measurement data such as cleanness and shape of substrate. (optional)
Depending on the specs, we have inventory for 2 to 8inch, or 300mm diameter substrates.
Please contact us for any inquiries.