Femtosecond Laser

Femtosecond laser processing has great advantages in precise micro-machining for transparent materials such as silica glass, sapphire, and diamond. Our processing technologies may provide the precise micro-holes and binary lens processing.

  • Quartz plate thickness 0.2 mm
    Micro hole diameter φ 2 μ
    396 holes

Features

The femtosecond laser has an ultra short pulse width of 100 fs (1fs=10^-15s) compared to that of the conventional YAG laser of several tens of ns (1ns=10^-9s).

The wavelength of the femtosecond laser is in the near-infrared light spectrum (800nm) which is transparent to materials such as a sapphire and a silica glass. However, focused femtosecond laser can induce refractive index modification inside the materials or ablate materials on the surface only around the focal point. By using these features, three-dimensional micro structures and micro optics can be generated on and inside the materials.

Fine Hole Processing

Fine Hole Processing Fine Hole Processing
Illustration of precision micro holes in a silica glass plate
Top Top
Top (φ=25μm, L=500μm)
Cross Section Cross Section
Cross Section
Dia.: 25μm, thichness: 500μm, silica glass

Specifications

  • - Min. diameter: ≥ 0.5μm
  • - Max. aspect ratio:≤ 20
  • - Circularity:≤ 1μm

Features

  • - High aspect ratio
  • - Small surface roughness (Ra ≤ 10nm)

Applications

  • - Micro nozzle
  • - Micro fluidics

Applicable materials

Three-dimensional hole
in a sapphire wafer

Three-dimensional hole in a sapphire waferThree-dimensional hole in a sapphire wafer

Binary lens processing

TopTop
Top
side Dia.: 1.0mmφ, silica glass side Dia.: 1.0mmφ, silica glass
Side
Dia.: 1.0mmφ, silica glass

Features

  • - Min. line width: ~2.5μm
  • - Max. diffraction efficiency: ~40%

Applications

  • Optical sensor window
  • - Micro lens

Applicable materials

Focused beam intensity distribution,
diameter(1/e2)=18μm

Combined processing by femtosecond laser and micro drill

side blind hole Microholeside blind hole Microhole

Combined processing by femtosecond laser and micro drill

Inquiry

Contact Us
TEL: +81-3-3919-2200
( Mon - Fri / 9 am - 5 pm in Japan )

Products
Fine Hole Processing
Contact Us
TEL: +81-3-3919-2200
( Mon - Fri / 9 am - 5 pm in Japan )

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